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実験教育を目的とした真空蒸着装置の改良実験教育を目的とした真空蒸着装置の改良AA12337561 ジッケン キョウイク オ モクテキ トシタ シンクウ ジョウチャク ソウチ ノ カイリョウ Improvement of the vacuum evaporator for the purpose of the experiment education |
"/高木, 淳/"高木, 淳 ,
"/大鐘, 亮/"大鐘, 亮
(51)
, pp.20
-
24 , 2016-03-31 , 愛知工業大学
ISSN:18833217
NCID:AA12337561
Description
"A vacuum evaporator is a primary device of the vacuum technology. It is mainly used for film manufacture of metal and metal oxide and is industrially useful for a semiconductor and electronic device manufacture. We adopt a vacuum evaporator in the physical experiment class opened for sophomore students in sciences for vacuum technical education in Aichi Institute of Technology. We reconsidered this device from an educational point of view and improved it as the apparatus that is easy to use, secure and superior in maintainability."
Full-Text
http://repository.aitech.ac.jp/dspace/bitstream/11133/3079/1/%e7%b4%80%e8%a6%8151%e5%8f%b7%28p20-p24%29.pdf