Departmental Bulletin Paper 実験教育を目的とした真空蒸着装置の改良
ジッケン キョウイク オ モクテキ トシタ シンクウ ジョウチャク ソウチ ノ カイリョウ
Improvement of the vacuum evaporator for the purpose of the experiment education

高木, 淳  ,  大鐘, 亮

愛知工業大学研究報告 = Bulletin of Aichi Institute of Technology
(51)  , pp.20 - 24 , 2016-03-31 , 愛知工業大学
ISSN:18833217
NCID:AA12337561
Description
"A vacuum evaporator is a primary device of the vacuum technology. It is mainly used for film manufacture of metal and metal oxide and is industrially useful for a semiconductor and electronic device manufacture. We adopt a vacuum evaporator in the physical experiment class opened for sophomore students in sciences for vacuum technical education in Aichi Institute of Technology. We reconsidered this device from an educational point of view and improved it as the apparatus that is easy to use, secure and superior in maintainability."
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http://repository.aitech.ac.jp/dspace/bitstream/11133/3079/1/%e7%b4%80%e8%a6%8151%e5%8f%b7%28p20-p24%29.pdf

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