Research Paper フェムト秒レーザとナノ秒レーザによる有機薄膜レーザ加工
フェムトビョウ レーザ ト ナノビョウ レーザ ニヨル ユウキ ハクマク レーザ カコウ
Organic Thin Film Laser Processing by Femtosecond Laser and Nanosecond Laser

津田, 紀生  ,  牧野, 佑紀  ,  小野, 秀介  ,  山田, 諄

Organic thin film is processed by femtosecond and nanosecond laser. Surface properties are evaluated by observation with laser microscope,and processing depth and area is measured. Radiation intensity from laser plasma near surface of organic thin film is observed using a spectrometer. Electron temperature is measured from the ratio of the spectral intensity. Femtosecond laser processing quality is better and the required laser energy is lower in comparison with nanosecond laser one.

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