研究報告書 シリコン単結晶の室温における静的曲げ及び疲労
シリコン タンケッショウ ノ シツオン ニオケル セイテキ マゲ オヨビ ヒロウ
Bending and fatigue of silicon single crystal at room temperature

高木, 誠  ,  松室, 昭仁  ,  岩田, 博之  ,  坂, 公恭

内容記述
The static four-point and three-point bending tests and the fatigue test of the silicon single crystal wafer specimens were carried out at room temperature After the tests,the specimens were investigated by the cross-sectional TEM observations in order to clarify the microstructural change. The cross sectional TEM observations indicated that the residual strain was caused in all of the specimens,and the dislocations were also observed after the fatigue tests.
本文を読む

http://repository.aitech.ac.jp/dspace/bitstream/11133/3061/1/%e7%b7%8f%e7%a0%9417%e5%8f%b7%28p77-81%29.pdf

このアイテムのアクセス数:  回

その他の情報