Research Paper 有機薄膜に対するレーザ加工特性の実験的評価
ユウキ ハクマク ニタイスル レーザ カコウ トクセイ ノ ジッケンテキ ヒョウカ
Experimental Evaluation of Laser Processing Properties for organic thin film

小野, 秀介  ,  角谷, 知樹  ,  中根, 孝英  ,  津田, 紀生  ,  山田, 諄  ,  落合, 鎮康

"Femtosecond and nanosecond laser processing properties of organic thin film are evaluated by observation with laser microscope to study laser patterning technique for organic solar cell. Femtosecond laser processing quality is better and the required laser energy is lower in comparison with nanosecond laser one due to laser processing phenomena. In addition, using assist-gas is not good for micro processing of organic thin film. Because, the micro processing does not achieve in this case. For laser patterning quality, the interaction between laser and plasma and the stage speed also relates for processing quality."

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