紀要論文 NPD 製マイクロボールエンドミルに対するレーザ/プラズマ複合加工技術
NPDセイ マイクロボール エンドミル ニ タイスル レーザ / プラズマ フクゴウ カコウ ギジュツ
Laser Assisted Plasma Etching Technique for Micro Ball-Endmill Made of Nano-Polycrystalline Diamond

天本 祥文  ,  仙波 卓弥  ,  アマモト ヨシフミ  ,  センバ タクヤ  ,  Amamoto Yoshifumi  ,  Semba Takuya

34pp.31 - 34 , 2017-10-31 , 福岡工業大学エレクトロニクス研究所 , Fukuoka Institute of Technology Electronics Research Laboratory
ISSN:0911050X
NII書誌ID(NCID):AN10015464
内容記述
A research project was conducted to develop a laser scanning machining techniques that enables to form the Nano-Polycrystalline Diamond (NPD) radius cutting tool in high-speed with a shape accuracy and a radius of round edge are less than 1 μm. Micro ball-endmill with a frank face of free formed shape and combined shape made up of conical face and hemispherical face was fabricated conducting laser machining to the NPD. Also, it has been clarified that by performing dry etching to the NPD micro ball-endmill, the radius of the cutting edge can be formed to less than 1 nm.
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http://repository.lib.fit.ac.jp/bitstream/11478/776/1/エレ研34_31P天本祥文先生.pdf

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