Journal Article Modeling of ablation of the target material for the plasma for coherent and incoherent EUV sources

佐々木, 明  ,  砂原, 淳  ,  西原, 功修  ,  西川, 亘

Particles emitted from the laser ablation have sometimes significant effect on the interaction between the laser and material thus the performance of the light sources. We propose a simulation model based on Lagrangian hydrodynamics taking the liquid-to-gas transition into account using a dynamic mesh reoraganiztion technique.

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