Journal Article Irradiation damage test of Mo/Si, Ru/Si and Nb/Si multilayers using the soft x-ray laser built at QST

Ichimaru, Satoshi  ,  石野, 雅彦  ,  錦野, 将元  ,  Hatayama, Masatoshi  ,  長谷川, 登  ,  河内, 哲哉  ,  Maruyama, Takashi  ,  Inokuma, Kazuhito  ,  Zenba, Mika  ,  Oku, Satoshi

Description
The irradiation damage for Mo/Si, Ru/Si, and Nb/Si multilayers are investigated using the soft X-ray laser system at QST. Scanning electronic microscopy observations reveal that the size of the damage on the Nb/Si multilayer is smaller than the other multilayers. This suggests that the damage fluence by the EUV irradiation of the Nb/Si multilayers is greater than the other multilayers.

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