313 , 2018-05 , Springer International Publishing
For the purpose of monitoring the intensity of laser-driven plasma soft X-ray laser (XRL) as well as providing an intense beam for XRL applications, the use of an X-ray photodiode detector coated with a Mo/Si multilayer mirror with high reflectance has been proposed and fabricated. The s-polarized reflectance of the multilayer-coated photodiode, MP, was measured to be 52.5% at an angle of incidence of 45° with synchrotron radiation at a wavelength of 13.9 nm. The transmittance of MP was 8.96%, which was defined as the ratio of the photodiode current measured at 45° to that at normal incidence. Moreover, with XRL pulses it is found that there is a strong correlation of 0.961 between the reflectance and transmittance of MP. These results indicate that the MP serves as a high reflectivity beam splitter with an X-ray detector enabling to be used for XRL applications.