Presentation Damage on EUV multilayer optics caused by irradiation of focused pico-second soft x-ray laser pulses

石野, 雅彦  ,  市丸, 智  ,  錦野, 将元  ,  長谷川, 登  ,  畑山, 雅俊  ,  河内, 哲哉  ,  奥, 哲

To study the damage mechanism of EUV multilayers, we have performed irradiation experiments of SXRL pulses having a wavelength of 13.9 nm and duration of 7 ps onto multilayers. By varying the irradiation fluence, the damage threshold could be estimated quantitatively. The estimated damage threshold of the EUV multilayer varies with the film material. However, the threshold did not depend on number of multilayer periods. We can conclude that the damage threshold is a parameter related to the film material only.

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