||B-C-N 系トライボコーティングの開発とその特性評価"第1報 反応性イオンプレーティングによる高温でのBN 膜形成"(学内特別研究および国外研修,学内特別研究費報告書)
Development of B-C-N Tribo-coatings and Their Characterization“1st Report: Deposition of BN Films at a High Temperature using Reactive Ion-plating"(Researches and Overseas Activities,Research Reports)
陳, 本栄 ,
渡部, 修一 ,
Honei, ChinShuichi, Watanabe
日本工業大学研究報告 = Report of researches, Nippon Institute of Technology
244 , 2017-06
In this article, the results obtained from a study carried out on BN films is reported. BN films were deposited using a reactive ion plating technique at a substrate temperature of 800 °C. This temperature is relatively high value which has not been reported so far. The results indicate that the stoichiometric BN film can be formed, the substrate bias is dependent on the hardness of the film, and the maximum hardness is exhibited at a lower bias value as compared with the conventional case where the substrate temperature is low.