Conference Paper An Ohmic Contact Type RF-MEMS Switch Having Au-Au/CNTs Contacts

Kageyama, Tomoaki  ,  Shinozaki, Koichi  ,  Zhang, Lan  ,  Lu, Jian  ,  Takaki, Hideki  ,  Lee, Sang-Seok  ,  影山, 智明  ,  篠崎, 孝一  ,  張, 嵐  ,  魯, 健  ,  高木, 秀樹  ,  李, 相錫

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Meeting Information: 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (April 9-12, 2017. UCLA Meyer & Renee Luskin Conference Center), Los Angeles, California, USA
Physical characteristics: Original contains color illustrations
形態: カラー図版あり

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