Journal Article Fabrication and Analysis of Three-Layer All-Silicon Interference Optical Filter with Sub-Wavelength Structure toward High Performance Terahertz Optics

Makitsubo, Hironobu  ,  Wada, Takehiko  ,  Kataza, Hirokazu  ,  Mita, Makoto  ,  Suzuki, Toyoaki  ,  Yamamoto, Keita  ,  槙坪, 宏展  ,  和田, 武彦  ,  片坐, 宏一  ,  三田, 信  ,  鈴木, 仁研  ,  山本, 啓太

38 ( 2 )  , pp.206 - 214 , 2017-02 , Springer Netherlands
ISSN:1866-6892
NCID:AA12382577
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Accepted: 2016-10-07

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