Conference Paper JAXAにおけるコンタミネーションの光学特性測定手法
Optical measurement methods of contamination at JAXA

宮崎, 英治  ,  美浦, 由佳  ,  島崎, 一紀  ,  沼田, 治  ,  山中, 理代  ,  木本, 雄吾  ,  Miyazaki, Eiji  ,  Miura, Yuka  ,  Shimazaki, Kazunori  ,  Numata, Osamu  ,  Yamanaka, Riyo  ,  Kimoto, Yugo

Basically, contamination control has been established based on thickness of contaminant in measurements and/or analysis. However, though effect of contaminant is much more important for users who have to implement contamination control than thickness of contaminant, it is limited to the thickness so far because of technical difficulties. In addition, there are very few literatures for such optical effects of condensed contaminants. In this situation, lots of efforts were made to understand the optical effect of condensed contaminants with ex-situ measurements, i.e., contaminants were deposited on a substrate in a vacuum chamber, then the substrate was measured outside the chamber by, e.g., a spectrometer. Ex-situ method has some disadvantages, e.g., thickness of contaminant can not be measured precisely; change can be occurred during handling in a room environment at atmospheric pressure, etc. In order to overcome such disadvantages, JAXA has developped two types of in-situ measurement apparatuses. In this paper, the authors report the overview of the two apparatuses and some results obtained by the apparatuses.
会議情報: 第59回宇宙科学技術連合講演会(2015年10月7日-9日. かごしま県民交流センター), 鹿児島市, 鹿児島県
形態: カラー図版あり
Physical characteristics: Original contains color illustrations

Number of accesses :  

Other information