Journal Article Fabrication of nanocone arrays by two step metal assisted chemical etching method

SHIMIZU, Tomohiro  ,  TANAKA, Norihiro  ,  TADA, Yoshihiro  ,  HARA, Yasuhiro  ,  NAKAMURA, Noriaki  ,  TANIUCHI, Junichi  ,  TAKASE, Koichi  ,  ITO, Takeshi  ,  SHINGUBARA, Shoso

pp.55 - 59 , 2016-01-27 , Elsevier
This work was supported by KAKENHI Grant Numbers 25790024, 25600048 and15K04602 from the Japan Society for the Promotion of Science (JSPS), Strategic Project to Support the Formation of Research Bases at Private Universities: Matching Fund Subsidy from the Ministry of Education, Culture, Sports, Science and Technology(MEXT), and Kansai University Subsidy for supporting Young Scholars 2013.
This work develops a novel method for preparing a moth eye structure, which has a sub-wavelength periodical Si nanocone structure on Si (100) substrate, using two-step metal assisted chemical etching (MACE). The 1st and 2nd MACE were respectively performed with the intention to form perpendicular Si nanowire arrays on a Si substrate and sharpening the Si nanowire arrays. We found the inhomogeneous absorption and aggregation of Au particles used as a catalyst for 2nd MACE was important to obtain the nanocone shape. The obtained Si nanocone arrays showed superior anti-reflecting properties especially in wavelength below 600 nm compared to the Si nanowire arrays. A possible mechanism involved in the formation of the nanocone structure by the 2-step MACE is discussed in this paper.

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