Journal Article Ultrahigh-Q photonic crystal nanocavities fabricated by CMOS process technologies

Ashida, Kohei  ,  Okano, Makoto  ,  Ohtsuka, Minoru  ,  Seki, Miyoshi  ,  Yokoyama, Nobuyuki  ,  Koshino, Keiji  ,  Mori, Masahiko  ,  Asano, Takashi  ,  Noda, Susumu  ,  Takahashi, Yasushi  ,  高橋, 和

25 ( 15 )  , pp.18165 - 18174 , 2017-07-24 , Optical Society of America
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