Thesis or Dissertation Study of Growth and Decomposition Reaction Mechanisms of Very Thin SiO2 Layer for Si CMOS Gate Stack

TANG, JIAYI

2016-03-25
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Tohoku University
博士
博士(工学)
11301甲第16960号
高桑雄二
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http://ir.library.tohoku.ac.jp/re/bitstream/10097/64332/1/160325-TANG-5176-0.pdf

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