Thesis or Dissertation Study of 3D Integration Technology Based on Chip Transfer-Stacking for Heterogeneous Integrated Sensor System

Hashiguchi, Hideto

2016-03-25
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要約のみ
Tohoku University
博士
博士(工学)
11301甲第17041号
田中徹
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http://ir.library.tohoku.ac.jp/re/bitstream/10097/64326/1/160325-Hashiguchi-5257-0.pdf

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