Thesis or Dissertation Development of Etching Process Simulator Based on Tight-Binding Quantum Chemical Molecular Dynamics Theory and Its Application to Design of MEMS and Semiconductor Processes

Ito, Hiroshi

2016-03-25
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Tohoku University
博士
博士(工学)
11301甲第17007号
久保百司
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http://ir.library.tohoku.ac.jp/re/bitstream/10097/64307/1/160325-Ito-5223-0.pdf

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