Thesis or Dissertation A Multi-functional SPM for Measurement of Micro-structured Surfaces

Zhigang, Jia

2015-03-25
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Tohoku University
博士
博士(工学)
11301甲第16360号
高偉
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http://ir.library.tohoku.ac.jp/re/bitstream/10097/60943/1/150325-Jia-5042-0.pdf

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