Book Design of Au-Based Micro-Components with High Structure Stability for Applications in MEMS Inertial Sensors

Chang, Tso-Fu Mark  ,  Chang, Tso-Fu Mark  ,  陳, 君怡  ,  Chen, Chun Yi  ,  石塚, 陽大  ,  Ishizuka, Yota  ,  寺西, 美波  ,  Teranishi, Minami  ,  鈴木, 拓真  ,  Suzuki, Takuma  ,  山根, 大輔  ,  Yamane, Daisuke  ,  小西, 敏文  ,  Konishi, Toshifumi  ,  町田, 克之  ,  Machida, Katsuyuki  ,  益, 一哉  ,  Masu, Kazuya  ,  曽根, 正人  ,  Sone, Masato

Number of accesses :  

Other information