Conference Paper Development of temperature controllable plasma for analysis of adhesive compounds on heat-sensitive substrate

守屋, 翔平  ,  Moriya, Shohei  ,  岡本, 悠生  ,  Okamoto, Yuki  ,  川野, 浩明  ,  Kawano, Hiroaki  ,  相田, 真里  ,  Aida, Mari  ,  御船, 星  ,  Mifune, Sei  ,  岩井, 貴弘  ,  Iwai, Takahiro  ,  宮原, 秀和  ,  Miyahara, Hidekazu  ,  沖野, 晃俊  ,  OKINO, AKITOSHI

p.146 , 2017-11

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