会議発表論文 Excitation-kinetic model for argon processing plasma diagnostics by optical emission spectroscopic measurement based on collisional-radiative model

山下, 雄也  ,  Yamashita, Yuya  ,  赤塚, 洋  ,  AKATSUKA, HIROSHI

2017-11 , International Syhmposium on Dry Process Organizing Committees
ISSN:978-4-900986-17-6
内容記述
To measure electron temperature and density of argon processing plasma by optical emission spectroscopic measurement, we made the excitation-kinetic models to describe excited-states densities, based on collisional-radiative model. The models tuned for a limited range of the electron temperature and density independent of the Griem's boundary can approximate the real excitation-kinetics well. Further prospects are discussed in terms of the excitation-kinetic models.

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