Conference Paper A Two-DOF MEMS Actuator Utilizing a Multi-pole Magnetized Permanent Magnet

吾妻, 範栄  ,  Azuma, Noriei  ,  田中, 駿也  ,  Tanaka, Shunya  ,  藤原, 良元  ,  Fujiwara, Ryogen  ,  進士, 忠彦  ,  SHINSHI, TADAHIKO

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