Conference Paper A Capacitive Sensor Circuit Based on Relaxation Oscillator for Sub-1mG MEMS Inertial Sensors

高安, 基大  ,  Takayasu, Motohiro  ,  道正, 志郎  ,  Dosho, Shiro  ,  伊藤, 浩之  ,  Ito, Hiroyuki  ,  山根, 大輔  ,  Yamane, Daisuke  ,  小西, 敏文  ,  Konishi, Toshifumi  ,  町田, 克之  ,  Machida, Katsuyuki  ,  石原, 昇  ,  Ishihara, Noboru  ,  益, 一哉  ,  Masu, Kazuya

2017-09

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