Study on Geometrical Parameters of Micro Check Valves made of SU-8

(No. 17-1) 2017-09 , 一般社団法人日本機械学会

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subject	Cantilever, Micro check valves, Diodicity, Microstructure, SU-8, FEM (finite element method)
publisher	一般社団法人日本機械学会
date	2017-09-19
NIItype	Conference Paper
language	en
identifier	oai:t2r2.star.titech.ac.jp:50390870
URL	http://jairo.nii.ac.jp/0083/00260921/en