Conference Paper Effect of ultra-thin SiOx insertion on a-Si:H (i) passivation layer deposited by facing target sputtering(5p-PB3-2)

ファリスアキラ, ビンモハマドズルキフリ  ,  Faris Akira, Bin Mohd Zulkifly  ,  白取, 優大  ,  Shiratori, Yuta  ,  中田, 和吉  ,  Nakada, Kazuyoshi  ,  宮島, 晋介  ,  Miyajima, Shinsuke

2017-09

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