Conference Paper Long-Term Vibration Testing of Ti/Au Micro-Cantilever Fabricated by Multi-Layer Metal Technology

橘, 航一朗  ,  Tachibana, Koichiro  ,  陳, 君怡  ,  Chen, Chun Yi  ,  Chang, Tso-Fu Mark  ,  Chang, Tso-Fu Mark  ,  山根, 大輔  ,  Yamane, Daisuke  ,  小西, 敏文  ,  Konishi, Toshifumi  ,  町田, 克之  ,  Machida, Katsuyuki  ,  益, 一哉  ,  Masu, Kazuya  ,  曽根, 正人  ,  Sone, Masato

2017-11

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