Conference Paper FEM Simulation on Structure Stability of Ti/Au Multi-Layered Cantilevers with Various Dimensions for Applications as Movable Structures in MEMS Devices

寺西, 美波  ,  Teranishi, Minami  ,  Chang, Tso-Fu Mark  ,  Chang, Tso-Fu Mark  ,  陳, 君怡  ,  Chen, Chun Yi  ,  山根, 大輔  ,  Yamane, Daisuke  ,  町田, 克之  ,  Machida, Katsuyuki  ,  益, 一哉  ,  Masu, Kazuya  ,  曽根, 正人  ,  Sone, Masato

2017-06

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