Conference Paper Electroplated Au-based Materials with High Micro-mecchanical Properties as MEMS accelerometer Components

陳, 君怡  ,  Chen, Chun-Yi  ,  Tang, Hao-Chun  ,  Tang, Hao-Chun  ,  Chang, Tso-Fu Mark  ,  Chang, Tso-Fu Mark  ,  山根, 大輔  ,  Yamane, Daisuke  ,  町田, 克之  ,  Machida, Katsuyuki  ,  益, 一哉  ,  Masu, Kazuya  ,  曽根, 正人  ,  Sone, Masato

2017-06

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