Conference Paper Proposal of a peristaltic micropump using dielectric elastomer actuators fabricated by MEMS technology

嚴, 祥仁  ,  EOM, Sang In  ,  宮田, 航成  ,  Miyata, Kosei  ,  浅井, 健太  ,  Asai, Kenta  ,  金, 俊完  ,  KIM, Joon-wan  ,  吉田, 和弘  ,  YOSHIDA, KAZUHIRO

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