Conference Paper III-V/Si Low Temperature Direct Bonding Technology for Photonic Device Integration on SOI

西山, 伸彦  ,  Nishiyama, Nobuhiko  ,  林, 侑介  ,  Hayashi, Yuusuke  ,  鈴木, 純一  ,  Suzuki, Junichi  ,  荒井, 滋久  ,  ARAI, SHIGEHISA

2017-02 , IEEE

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