Conference Paper Vacuum annealing and passivation of Hf<sub>2</sub> FET for mitigation of atmospheric degradation

UPADHYAYA, VIKRANT  ,  Upadhyaya, Vikrant  ,  金澤, 徹  ,  Kanazawa, Toru  ,  宮本, 恭幸  ,  MIYAMOTO, YASUYUKI

(A5-7)  , pp.231 - 235 , 2016-07

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