Conference Paper Growth of Epitaxial Orthorhombic YO1.5-Substituted HfO2 Thin Film

清水, 荘雄  ,  Shimizu, Takao  ,  木口, 賢紀  ,  Kiguchi, Takanori  ,  白石, 貴久  ,  Shiraishi, Takahisa  ,  Konno, Toyohiko J.  ,  坂田, 修身  ,  Sakata, Osami  ,  舟窪, 浩  ,  FUNAKUBO, HIROSHI

2015-11

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