Conference Paper Effect of Stress on Ferroelectricity of (Hf0.5Zr0.5)O2 Thin Films

舟窪, 浩  ,  FUNAKUBO, HIROSHI  ,  白石, 貴久  ,  Shiraishi, Takahisa  ,  清水, 荘雄  ,  Shimizu, Takao  ,  横内, 達彦  ,  Yokouchi, Tatsuhiko  ,  内田, 寛  ,  Uchida, Hiroshi

2015-09

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