Conference Paper Fabrication of InGaAs channel multi-gate MOSFETs with MOVPE regrown source/drain

木下, 治紀  ,  Kinoshita, Haruki  ,  祢津, 誠晃  ,  Seikou, Netsu  ,  三嶋, 裕一  ,  Mishima, Yuichi  ,  金澤, 徹  ,  Kanazawa, Toru  ,  宮本, 恭幸  ,  MIYAMOTO, YASUYUKI

2015-08

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