Conference Paper Reactive Sputtering Process and Properties of Ba(ZrxTi1-x)O3 Films for High Frequency Applications

安井, 伸太郎  ,  Yasui, Shintaro  ,  舟窪, 浩  ,  FUNAKUBO, HIROSHI  ,  西田, 謙  ,  nishida, ken

2015-05

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