Journal Article Mechanism of TCO thin film removal process using near-infrared ns pulse laser: plasma shielding effect on irradiation direction

Kim, Byunggi  ,  Kim, Byunggi  ,  飯田, 亮一  ,  Iida, Ryoichi  ,  Doan, Doku  ,  Doan, Doku hon  ,  伏信, 一慶  ,  FUSHINOBU, KAZUYOSHI

2016

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