Journal Article Epitaxial growth of silicon nanowire arrays at wafer-scale using high-speed rotating-disk CVD for improved light-trapping

張, 暁梅  ,  Zhang, Xiao Mei  ,  秋田, 大  ,  Akita, Hiroshi  ,  伊原, 学  ,  Ihara, Manabu

18pp.6153 - 6157 , 2016-07 , Royal Society of Chemistry

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