Conference Paper Controllable Mechanical Properties of Au Films by Pulse Electroplating for MEMS Accelerometer

葭葉, 将治  ,  Yoshiba, Masaharu  ,  陳, 君怡  ,  Chen, Chun Yi  ,  Chang, Tso-Fu Mark  ,  Chang, Mark  ,  名越, 貴志  ,  Nagoshi, Takashi  ,  山根, 大輔  ,  Yamane, Daisuke  ,  町田, 克之  ,  Machida, Katsuyuki  ,  益, 一哉  ,  Masu, Kazuya  ,  曽根, 正人  ,  Sone, Masato

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