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Micro-Bending Tests of Pure Gold Cantilevers for Applications as Movable Components in MEMS Devices Micro-Bending Tests of Pure Gold Cantilevers for Applications as Movable Components in MEMS Devices |
浅野, 啓介 , Asano, Keisuke , Tang, Hao-Chun , Tang, Hao-Chun , 陳, 君怡 , Chen, Chun Yi , Chang, Tso-Fu Mark , Chang, Mark , 山根, 大輔 , Yamane, Daisuke , 町田, 克之 , Machida, Katsuyuki , 益, 一哉 , Masu, Kazuya , 曽根, 正人 , Sone, Masato
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