Conference Paper Micro-Bending Tests of Pure Gold Cantilevers for Applications as Movable Components in MEMS Devices

浅野, 啓介  ,  Asano, Keisuke  ,  Tang, Hao-Chun  ,  Tang, Hao-Chun  ,  陳, 君怡  ,  Chen, Chun Yi  ,  Chang, Tso-Fu Mark  ,  Chang, Mark  ,  山根, 大輔  ,  Yamane, Daisuke  ,  町田, 克之  ,  Machida, Katsuyuki  ,  益, 一哉  ,  Masu, Kazuya  ,  曽根, 正人  ,  Sone, Masato

Number of accesses :  

Other information