||Discussion on Population Kinetics and Number Densities of Excited Species of Low-Pressure Discharge Nitrogen Plasma
Discussion on Population Kinetics and Number Densities of Excited Species of Low-Pressure Discharge Nitrogen Plasma
赤塚, 洋 ,
AKATSUKA, HIROSHI ,
柴田, 智彦 ,
Shibata, Tomohiko ,
根津, 篤Nezu, Atsushi
IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING
2016-06 , John Wiley & Sons, Inc.
A numerical model is constructed to calculate the number densities of some excited species of nitrogen in low-pressure discharge nitrogen plasma, together with simultaneous solution of the self-consistent electron energy distribution function and N2-vibration distribution function. We consider species N2(X), N2(A), N2(B), N2(C), N2(a), N2(a'), N2+, N4+, N(4S) and e-. Inaddition to electron collisional reactions, diffusion losses and molecular relations are included. It is found that the ratio of numberdensities of N2(B) and N2(C) states can be a good measure of the electron kinetic temperature. The N2(C) state is found to be almost in a corona equilibrium, whereas the N2(B) state becomes mainly populated by N2(X, v ≥ 6) + N2(A) reaction and depopulated by collisional relaxation by the ground-state N2(X) molecule.