Conference Paper Apodized Amorphous Silicon Grating Coupler with Metal Mirrors for 3D optical Interconnection

久能, 雄輝  ,  Kuno, Yuki  ,  林, 雄介  ,  Hayashi, Yusuke  ,  鈴木, 純一  ,  Suzuki, Junichi  ,  雨宮, 智宏  ,  Amemiya, Tomohiro  ,  西山, 伸彦  ,  Nishiyama, Nobuhiko  ,  荒井, 滋久  ,  ARAI, SHIGEHISA

(25J1-3) 2015-08

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