Conference Paper Fabrication of silicon nanocrystals by VHF plasma processes

山崎, 将太郎  ,  Yamazaki, Shoutarou  ,  池本, 和史  ,  Ikemoto, Kazufumi  ,  島本, 祐輔  ,  Shimamoto, Yusuke  ,  小田, 俊理  ,  ODA, SHUNRI

2015-05

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