Conference Paper High Strength Au film Fabricated by Advanced Electrochemical Technique in Supercritical CO2 Emulsified Electrolyte for MEMS Accelerometers

陳, 君怡  ,  Chen, Chun Yi  ,  葭葉, 将治  ,  Yoshiba, Masaharu  ,  TSO-FU, MARK CHANG  ,  Chang, Mark  ,  山根, 大輔  ,  Yamane, Daisuke  ,  町田, 克之  ,  Machida, Katsuyuki  ,  益, 一哉  ,  Masu, Kazuya  ,  曽根, 正人  ,  Sone, Masato

Number of accesses :  

Other information