Conference Paper A MEMS Inertia Sensor with Brownian Noise of Below 50 nG/Hz^1/2 by Multi-Layer Metal Technology

山根, 大輔  ,  Yamane, Daisuke  ,  小西, 敏文  ,  Konishi, Toshifumi  ,  年吉, 洋  ,  Toshiyoshi, Hiroshi  ,  益, 一哉  ,  Masu, Kazuya  ,  町田, 克之  ,  Machida, Katsuyuki

pp.148 - 149 , 2016-02

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