Conference Paper Nanoscale Wiring by Cu Electrodeposition in Supercritical Carbon Dioxide Emulsified Electrolyte toward 3D Integrated Circuits (Invited Lecture)

曽根, 正人  ,  Sone, Masato  ,  TSO-FU, MARK CHANG  ,  Chang, Mark  ,  清水, 徹也  ,  Shimizu, Tetsuya  ,  篠田, 奈緒  ,  Shinoda, Nao

2016-06

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