Journal Article ECF MICROPUMP FABRICATED BY ELECTROFORMING WITH NOVEL SELF-ALIGNED MICRO-MOLDING TECHNOLOGY

HAN, DONG  ,  Han, Dong  ,  金, 俊完  ,  KIM, Joon-wan  ,  横田, 眞一  ,  YOKOTA, SHINICHI  ,  枝村, 一弥  ,  Edamura, Kazuya

660 ( No. 1 )  , p.012029 , 2015-12 , IOP Publishing

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