Conference Paper A Study on a Micropump Using Stacked Diaphragm-Type Dielectric Elastomer Actuators - Concept and Basic Investigations -

嚴, 祥仁  ,  EOM, Sang In  ,  宝来, 亮汰  ,  Hourai, Ryouta  ,  吉田, 和弘  ,  YOSHIDA, KAZUHIRO  ,  横田, 眞一  ,  YOKOTA, SHINICHI

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