Conference Paper Approximate Monitoring of Electron Temperature and Density of Argon-Based Plasma by Line-Intensity Ratio Measurement with Collisional Radiative Model

赤塚, 洋  ,  AKATSUKA, HIROSHI  ,  安藤, 健太朗  ,  Ando, Kentaro  ,  根津, 篤  ,  Nezu, Atsushi  ,  桑原, 大介  ,  Kuwahara, Daisuke  ,  篠原, 俊二郎  ,  SHINOHARA, Shunjiro

pp.95 - 96 , 2015-11 , The Japan Society of Applied Physics
We surveyed the dependence of excited-state density of argon atom on the electron temperature Te and density Ne by applying Ar CR model. It is found that the ratios between some level pairs can be interpreted as an approximate measure of Te, and some others as that of Ne. For example, the density ratio of (4p’[1/2]0)/(4p[1/2]0) is determined mostly by Te, while that of (4d[3/2]o)/(4p[1/2]) mostly by Ne. We discuss the reason for this difference for each level pair in terms of atomic processes in the argon plasma, based on the CR model.

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