
Discussion on Electron Temperature of LowPressure Discharge Oxygen Plasma with NonMaxwellian EEDF Based on Statistical PhysicsDiscussion on Electron Temperature of LowPressure Discharge Oxygen Plasma with NonMaxwellian EEDF Based on Statistical Physics Discussion on Electron Temperature of LowPressure Discharge Oxygen Plasma with NonMaxwellian EEDF Based on Statistical Physics 
"/赤塚, 洋/"赤塚, 洋 ,
"/AKATSUKA, HIROSHI/"AKATSUKA, HIROSHI ,
"/田中, 昌徳/"田中, 昌徳 ,
"/Tanaka, Yoshinori/"Tanaka, Yoshinori
60
(
No. 9
)
, pp.148

149 , 201510 , The American Physical Society
ISSN:00030503
Description
We reconsider electron temperature of nonequilibrium oxygen plasmas based on thermodynamics and statistical physics by the relationship between entropy and mean energy of electron gas. First, we solve the Boltzmann equation to obtain electron energy distribution function (EEDF) F(ϵ) of the oxygen plasma for a given reduced electric field E/N. We also simultaneously solve kinetic equations to determine some essential excited species in the oxygen plasma, since the EEDF should be selfconsistently solved with the densities of collision partners. Next, we calculate the electron mean electron energy U=⟨ϵ⟩=∫∞0ϵF(ϵ)dϵ and entropy S=−k∫∞0F(ϵ)ln[F(ϵ)]dϵ for each value of the reduced electric field E/N. Then, we can obtain the electron temperature calculated as Tthe=[∂S/∂U]−1. After that, we discuss the difference between Tthe and the kinetic temperature Tke≡(2/3)⟨ϵ⟩, as well as the temperature given as a slope of the calculated EEDF for each value of E/N from the viewpoint of statistical physics as well as elementary processes.